JPH0350330U - - Google Patents
Info
- Publication number
- JPH0350330U JPH0350330U JP11012989U JP11012989U JPH0350330U JP H0350330 U JPH0350330 U JP H0350330U JP 11012989 U JP11012989 U JP 11012989U JP 11012989 U JP11012989 U JP 11012989U JP H0350330 U JPH0350330 U JP H0350330U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- raw material
- chemical vapor
- generation device
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000006185 dispersion Substances 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims 2
- 239000002994 raw material Substances 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- 239000012808 vapor phase Substances 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11012989U JPH0350330U (en]) | 1989-09-20 | 1989-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11012989U JPH0350330U (en]) | 1989-09-20 | 1989-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0350330U true JPH0350330U (en]) | 1991-05-16 |
Family
ID=31658681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11012989U Pending JPH0350330U (en]) | 1989-09-20 | 1989-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0350330U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014534644A (ja) * | 2011-11-17 | 2014-12-18 | ユ−ジーン テクノロジー カンパニー．リミテッド | 補助ガス供給ポートを含む基板処理装置 |
-
1989
- 1989-09-20 JP JP11012989U patent/JPH0350330U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014534644A (ja) * | 2011-11-17 | 2014-12-18 | ユ−ジーン テクノロジー カンパニー．リミテッド | 補助ガス供給ポートを含む基板処理装置 |